Oxidised Macro Porous Silicon based Thermal Isolation in the Design of Microheater for MEMS based Gas Sensors
نویسندگان
چکیده
Chemical gas sensors suffers from the drawbacks such as high temperature ((>=300oC) and very high power consumption for sensing inflammable gases like CO, CH4 etc. In this work a new technique for thermal isolation in MEMS gas sensors is presented by coupling micromachining of bulk silicon and oxidized macro porous silicon (OMPS) layer to reduce the
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